04:00
2026-08-04
arxiv.org
machine-learning
A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion
Researchers introduced a physics-chemistry-informed neural network (PCINN) that predicts surface coverage in spatial atomic layer deposition (SALD) in about 7 milliseconds, roughly 50,000 times faster…