# Samsung, ASML deepen partnership to advance High-NA EUV > Source: > Published: 2026-09-08 06:12:38+00:00 Two companies' longstanding collaboration expands into High-NA EUV and next-generation semiconductor manufacturing Samsung Electronics and Dutch manufacturer of chip equipment ASML said Tuesday they would expand their long-standing partnership on next-generation lithography technologies critical to producing advanced AI chips. The expanded partnership between South Korea’s largest chipmaker and ASML focuses on high numerical aperture extreme ultraviolet lithography and advanced photomask solutions, areas expected to become increasingly important as chipmakers push the limits of semiconductor scaling. As part of the expanded partnership, Samsung will help develop a next-generation 12-inch photomask platform for High-NA EUV manufacturing. Photomasks act as templates that transfer circuit patterns onto semiconductor wafers during the chipmaking process. While the industry has traditionally relied on 6-inch photomasks, larger 12-inch formats are expected to improve manufacturing efficiency by supporting more advanced patterning processes and reducing complexity in future semiconductor production. The move comes as global chipmakers face mounting challenges in developing smaller and more powerful semiconductors. As artificial intelligence applications drive demand for high-performance computing, companies are racing to secure technologies that can deliver greater processing capability while improving production efficiency. High-NA EUV is widely viewed as the next major step in semiconductor lithography. The technology builds on existing EUV systems by improving resolution capabilities, allowing manufacturers to create more precise circuit patterns for future generations of logic and memory chips. For Samsung, adopting High-NA EUV is closely tied to its competitive strategy in the memory semiconductor market. The company plans to apply the technology to future DRAM production as it seeks to strengthen its position in areas such as high-bandwidth memory, which has become a key component in AI infrastructure. The latest cooperation also reflects a relationship between Samsung and ASML that has developed over more than a decade. The two companies have worked closely since EUV lithography was still considered a major technological challenge for the semiconductor industry. As traditional methods approached physical limits, EUV emerged as a breakthrough technology capable of enabling more advanced semiconductor manufacturing. ASML, the world’s leading supplier of semiconductor lithography equipment, has become a critical player in the global chip supply chain through its EUV systems. The company remains the only manufacturer capable of supplying commercial EUV lithography machines used by leading semiconductor producers worldwide. Samsung was among the early semiconductor companies to adopt EUV technology and has continued expanding its use across both memory and foundry operations. The company’s experience with EUV manufacturing has positioned it as one of the key players in the transition toward next-generation semiconductor processes. "The AI era is transforming the semiconductor industry and increasing the importance of technological innovation across the entire value chain," Samsung Electronics Vice Chairman and CEO Jun Young-hyun said. "By further strengthening our collaboration with ASML, we are helping lay the foundation for the next generation of AI and semiconductor innovation." ASML President and CEO Christophe Fouquet also emphasized the importance of cooperation between equipment suppliers and chip manufacturers as the semiconductor industry enters a new phase of technological competition. "As the industry enters a new era driven by artificial intelligence, close collaboration with our customers becomes even more important," Fouquet said. The partnership highlights a broader shift in the semiconductor industry, where access to advanced manufacturing technologies has become a strategic advantage. As demand for AI-related chips continues to reshape the market, Samsung and ASML are seeking to strengthen their positions by advancing the technologies that will define the next generation of semiconductor production. yeeun@heraldcorp.com