Low-cost OSS maskless photolithography stepper for microfabrication (2025)

Researchers have developed a $3,000 open-source maskless photolithography stepper that uses a DLP projector and deep learning computer vision to achieve sub-2-micron resolution, enabling low-cost microfabrication of devices like NMOS transistors.

Physics Instrumentation and Detectors Submitted on 16 Oct 2025 Title:A low-cost, open-source maskless photolithography stepper for microfabrication View PDF /pdf/2510.15082 HTML experimental https://arxiv.org/html/2510.15082v1 Abstract:Photolithography is a key part of modern semiconductor process flows, and photolithography steppers have been used for decades to achieve precise patterning for device fabrication. However, these tools are often large and expensive, which restricts their use to industry and well-funded university laboratories. In this paper, we propose a $3000 maskless photolithography stepper that is affordable, open-source, and easy to assemble. The stepper, which uses a Digital Light Processing DLP projector as its optical engine, is able to achieve an optical resolution of under 2 microns. The stepper also features a motorized micropositioning system, which is able to align features with single-digit micron precision. A deep learning computer vision model is also used to achieve fine-grain alignment of patterns on a chip. These capabilities allow for the use of the stepper for microfabrication to produce micron-scale devices such as NMOS transistors. Current browse context: physics.ins-det Change to browse by: References & Citations Loading... Bibliographic and Citation Tools Bibliographic Explorer What is the Explorer? https://info.arxiv.org/labs/showcase.html arxiv-bibliographic-explorer Connected Papers What is Connected Papers? https://www.connectedpapers.com/about Litmaps What is Litmaps? https://www.litmaps.co/ scite Smart Citations What are Smart Citations? https://www.scite.ai/ Code, Data and Media Associated with this Article alphaXiv What is alphaXiv? https://alphaxiv.org/ CatalyzeX Code Finder for Papers What is CatalyzeX? https://www.catalyzex.com DagsHub What is DagsHub? https://dagshub.com/ Gotit.pub What is GotitPub? http://gotit.pub/faq Hugging Face What is Huggingface? https://huggingface.co/huggingface ScienceCast What is ScienceCast? https://sciencecast.org/welcome Demos Recommenders and Search Tools Influence Flower What are Influence Flowers? https://influencemap.cmlab.dev/ CORE Recommender What is CORE? https://core.ac.uk/services/recommender arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs https://info.arxiv.org/labs/index.html .