{"type": "article", "title": "Redesigned high-NA lithography optical system aims to revolutionize chipmaking", "publisher": "Web Pulse", "url": "https://wpnews.pro/news/redesigned-high-na-lithography-optical-system-aims-to-revolutionize-chipmaking", "original_source": "https://www.oist.jp/news-center/news/2026/6/16/redesigned-high-na-lithography-optical-system-aims-revolutionize-semiconductor-chipmaking", "published": "2026-06-17T11:39:03+00:00", "accessed": "2026-06-17", "id": "redesigned-high-na-lithography-optical-system-aims-to-revolutionize-chipmaking"}