{"type": "article", "title": "Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction", "publisher": "Web Pulse", "url": "https://wpnews.pro/news/physics-informed-generative-ai-for-semiconductor-manufacturing-enforcing-hard-in", "original_source": "https://arxiv.org/abs/2606.11247", "published": "2026-06-12T04:00:00+00:00", "accessed": "2026-06-13", "id": "physics-informed-generative-ai-for-semiconductor-manufacturing-enforcing-hard-in"}