{"type": "article", "title": "Low-cost OSS maskless photolithography stepper for microfabrication (2025)", "publisher": "Web Pulse", "url": "https://wpnews.pro/news/low-cost-oss-maskless-photolithography-stepper-for-microfabrication-2025", "original_source": "https://arxiv.org/abs/2510.15082", "published": "2026-07-07T20:47:43+00:00", "accessed": "2026-07-07", "id": "low-cost-oss-maskless-photolithography-stepper-for-microfabrication-2025"}