{"type": "article", "title": "A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion", "publisher": "Web Pulse", "url": "https://wpnews.pro/news/a-physics-chemistry-informed-neural-network-pcinn-for-real-time-spatial-ald-and", "original_source": "https://arxiv.org/abs/2608.00212", "published": "2026-08-04T04:00:00+00:00", "accessed": "2026-08-04", "id": "a-physics-chemistry-informed-neural-network-pcinn-for-real-time-spatial-ald-and"}